Class-E/F Inverter Applied to plasma generator with adaptive Control

Abstract

At the radio frequency the induction plasma generator is very attractive for several industrial applications especially in material processing, so an inductively coupled plasma generator is developed in this paper. A high-frequency power supply class-E/F inverter is required to generate the magnetic field at frequency ranging from hundreds of kilohertz to tens of megahertz offer high efficiencies at high power densities. A resonant inverter based on zero-voltage switching and an adaptive control via a backstepping based on Lyapunov theory is used as a power supply. This paper presents the circuit modelling, simulation and control considerations.