SPECTROSCOPIC CHARACTERIZATION OF LOW PRESSURE ARGON DISCHARGE CREATED BY INDUCTIVELY COUPLED PLASMA SOURCE

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Title:	SPECTROSCOPIC CHARACTERIZATION OF LOW PRESSURE ARGON DISCHARGE CREATED BY INDUCTIVELY COUPLED PLASMA SOURCE
Authors:	M. M. ALIM, R. TADJINE, L. HENNI, M. ZEKARA and K. HENDA
Keywords:	OES large area reactor Ar plasma ICP
Issue Date:	22-Dec-2013
Series/Report no.:	2011;
Abstract:	In this report, we are interested in large area reactor plasma created by Inductively Coupled Plasma (ICP) source. We present results of spectroscopic characterization at low pressure argon discharge in large area reactor created by ICP source. We’ve particularly followed the evolution of ionic argon line intensity 514.5 nm which is the second most intense line of ionic argon, versus power and pressure.
Description:	SIPP 2011 UKM Ouargla 13 15 Fevrier 2011
URI:	http://hdl.handle.net/123456789/3752
ISSN:	ya
Appears in Collections:	1. Faculté des mathématiques et des sciences de la matière

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