MODELISATION NUMERIQUE DES PROPRIETES ELECTRIQUES DANS UN PULVERISATEUR CATHODIQUE MAGNETRON

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DC Field	Value	Language
dc.contributor.advisor	M.T. MEFTAH	-
dc.contributor.author	Z. BALLAH	-
dc.contributor.author	F. KHELFAOUI	-
dc.date.accessioned	2009	-
dc.date.available	2009	-
dc.date.issued	2009	-
dc.identifier.issn	2170-0672	-
dc.identifier.uri	http://dspace.univ-ouargla.dz/jspui/handle/123456789/6428	-
dc.description	AST Annales des Sciences et Technologie	en_US
dc.description.abstract	To study the electric properties of Argon plasma used in deposition of thin silicon films by the process of magnetron sputtering with a radiofrequency of 13.5 MHz , we have applied the model of fluids for a stationary one dimensional system. The properties calculated are the electronic density, the ionic density, the electrical field and the electrical potential. This model is based on the electronic continuity equation, the ionic continuity equation and Poisson's equation. We applied these results on the Langmuir probe to find the characteristic current-voltage.	en_US
dc.language.iso	fr	en_US
dc.relation.ispartofseries	volume 1 numéro 3 AST 2009;	-
dc.subject	Plasma	en_US
dc.subject	magnetron sputtering	en_US
dc.subject	Langmuir probe	en_US
dc.subject	electrical properties	en_US
dc.title	MODELISATION NUMERIQUE DES PROPRIETES ELECTRIQUES DANS UN PULVERISATEUR CATHODIQUE MAGNETRON	en_US
dc.type	Article	en_US
Appears in Collections:	volume 1 numéro 3 AST 2009

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