MODELISATION NUMERIQUE DES PROPRIETES ELECTRIQUES DANS UN PULVERISATEUR CATHODIQUE MAGNETRON

Abstract

To study the electric properties of Argon plasma used in deposition of thin silicon films by the process of magnetron sputtering with a radiofrequency of 13.5 MHz , we have applied the model of fluids for a stationary one dimensional system. The properties calculated are the electronic density, the ionic density, the electrical field and the electrical potential. This model is based on the electronic continuity equation, the ionic continuity equation and Poisson's equation. We applied these results on the Langmuir probe to find the characteristic current-voltage.